Microelectronics Failure Analysis

DVD 5

Lecture 13

"Issues of Backside Sample Prep"
Presenter: Dan Barton
Sandia Labs

In Lecture 13  

Topics:

• Light transmission through silicon
• Optical image formation through silicon
• Backside preparation techniques
• Global Si thinning
• Local Si thinning/Precision probe hole milling 
• Backside FA techniques 
• Passive (emission-based) techniques
• Active techniques

Included with this lecture, you will receive 108 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a biography of  Dan Barton 

Click here for a sample video of the presentation in Windows Media format. Note: Size and Quality of this clip have been reduced for web use. 

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Note: Sample Video Clips require Windows Media Player. If you do not have it, you can download it here for Free Click the Windows Icon to Begin downloading

Mac Users Click here

Lecture 14

"Backside Analysis Techniques"
Presenter: Mike Bruce
AMD

Lecture 14 is extremely informative! Mike begins the discussion of Backside Failure Analysis using commercially available techniques, then follows up with a smattering of “not quite ready for primetime” techniques. This information is based on a review written for Electron Device Failure Analysis Magazine, published November 2003.
Co-Authors were Victoria Bruce, Seth Prejean, and Jeffery Huynh.

Topics:

• Backside Optical Microscopy
• Backside Photon Emission Microscopy
• Static and Time Resolved (PICA)
• Laser Based Fault Isolation
• LIVA, TIVA, OBIRCH, SEI, SCOBIC, SDL, LVP
• Backside Sample Preparation
• Parallel Polishing, Milling, Laser Chemical Etching
• Backside Deprocessing
• Backside FIB (Focused Ion Beam)

Included with this lecture, you will receive 35 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a biography of  Mike Bruce 

Click here for a sample video of the presentation in Windows Media format. Note: Size and Quality of this clip have been reduced for web use. 

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Note: Sample Video Clips require Windows Media Player. If you do not have it, you can download it here for Free Click the Windows Icon to Begin downloading

Mac Users Click here

Lecture 15

"Photoemission Techniques"
Presenter: Dan Barton
Sandia Labs

Lecture 15 - Dan explains the finer points of photoemission in this lecture and supports his discussion with plenty of math and graphs. No details are left unexplained. It is best to watch this one first thing in the morning, while your brain is still fresh!

Topics:

• Light emission theory

• Light Emission Microscopy / Pros and Cons

• Spectral analysis

• Light emission systems

• Backside analysis

Included with this lecture, you will receive 66 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a biography of  Dan Barton 

Click here for a sample video of the presentation in Windows Media format. Note: Size and Quality of this clip have been reduced for web use. 

Add To Cart       View Cart

Note: Sample Video Clips require Windows Media Player. If you do not have it, you can download it here for Free Click the Windows Icon to Begin downloading

Mac Users Click here
 

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