Microelectronics Failure Analysis

DVD 4

Lecture 10

"Deprocessing and Sample Preparation"
Presenter: Mike Strizich

Lecture 10 explains how chemical deprocessing, mechanical lapping and cross sectioning techniques have become extremely important to the failure analyst. Shrinking geometry sizes and introduction of new materials make this even more challenging.

 Topics:

• BASIC CHEMISTRY

• PASSIVATION REMOVAL

• PLASMA ETCHING AND RIE ETCHING

• METAL ETCHES (Al vs. Cu)  

• POLYSILICON ETCHES

• SILICON ETCHES

• PARALLEL LAPPING

• CROSS SECTION STAINS

• BACKSIDE ETCHING

• GaAs ETCHES

Included with this lecture, you will receive 47 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a biography of Mike Strizich

Click here for a sample video of the presentation in Windows Media format. Note: Size and Quality of this clip have been reduced for web use. 

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Lecture 11

"Soft Defect Localization"
Presenter: Ed Cole
Sandia Labs

Lecture 11  - Ed describes laser scanning microscopy methods used to isolate soft defects. This is usually referred to as Soft Defect Localization or SDL. SDL is a technique that quickly and easily locates soft defects on complex ICs and is applicable from the front and backside of an IC.

Topics:

• Discussion of Soft Defects

• Physics of SDL

• SDL Imaging System

• SDL Imaging Results

• Many interesting pictures are explained

Included with this lecture, you will receive 31 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a biography of Ed Cole

Click here for a sample video of the presentation in Windows Media format.Note: Size and Quality of this clip have been reduced for web use. 

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Lecture 12

"Advanced Fault Isolation  - Thermal Imaging"
Presenter: Dan Barton
Sandia Labs

 Lecture 12 - it's all about Thermal Imaging. Dan introduces the concepts of locating Blackbody Radiation (hot spots) within integrated circuits using techniques such as IR Thermography, Liquid Crystal Detection and Fluorescent Microthermal Imaging.

Topics:

• Liquid Crystal Thermography(LC)

• Fluorescent Microthermal Imaging (FMI)

• Infrared Thermography (IRT

• Optical Interferometry

• Thermoreflectance Laser Probing

• Photothermal Deflection Spectroscopy (PDS)

• Internal Infrared Laser Deflection

• STM - Thermocouple Probe

• ISFM - Resistive Probe Tip

Included with this lecture, you will receive 87 presentation slides in PDF format. Lecture time is approximately 75 minutes.

Click here for a biography of Dan Barton

Click here for a sample video of the presentation in Windows Media format. Note: Size and Quality of this clip have been reduced for web use. 

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Note: Sample Video Clips require Windows Media Player. If you do not have it, you can download it here for Free Click the Windows Icon to Begin downloading

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